CMN Intranet

From these pages you can book equipment using the online booking facility , obtain documentation for the equipment in the centre as well as obtain information relating to processes developed in the centre.

Booking Equipment

To view the availability and book equipment in the centre, please use the booking facility.

Documentation

• Leo SEM & Raith Lithography Stage
1. Leo 1530 Gemini SEM User Manual
2. Raith Elphy Plus User Manual
• FEI FEG SEM
• DI AutoProbe CP
1. User Manual Part 1
2. User Manual Part 2
3. Nanolithography Manual
4. Proscan Manual
• DI Aurora II SNOM
1. User Manual
2. Laser Manual
3. Nanolithography Manual
4. IOU Manual
5. SPMLab Reference Manual
6. SPMTools Reference Manual
• PlasmaQuest Sputtering Deposition System
• Moorfield MiniLab Deposition System

Process Information

Detailed descriptions of common processes can be found below.

• Scribing Substrates (P. W. Nutter)
• Cleaning Substrates (P. W. Nutter)
• Optical Lithography (P. W. Nutter)
• Using the Leybold System for Pt/Co Multilayer film Deposition (P. W. Nutter)
• Photolithography Process using PMGI Resist (D. Jiang)